Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.279403
Title: In-lens deflectors for an LVSEM magnetic immersion objective lens
Authors: Zhao, Y.
Khursheed, A. 
Keywords: Deflector
Immersion objective lens
In-lens deflection
MOL
SEM
Issue Date: 1997
Source: Zhao, Y., Khursheed, A. (1997). In-lens deflectors for an LVSEM magnetic immersion objective lens. Proceedings of SPIE - The International Society for Optical Engineering 3155 : 37-46. ScholarBank@NUS Repository. https://doi.org/10.1117/12.279403
Abstract: Two in-lens deflector arrangements integrated into a conical tip immersion objective lens are presented in this paper. One is of a saddle type placed on the inner-surface of the upper pole-piece close to the tip. Another is of a toroidal type integrated on the immersion objective lens by winding its coils around the upper pole-piece tip through small wire- passing holes. A nearly perfect moving objective lens (MOL) condition can be achieved with the saddle arrangement. The on- pole piece-tip toroidal deflector, although operating far from an ideal MOL condition, can also provide a wide field of view if certain parameters, such as the excitation current and the orientation angle, are chosen properly. At the optimum operation conditions, vertical landing of the probe can also be maintained. ©2005 Copyright SPIE - The International Society for Optical Engineering.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/72701
ISSN: 0277786X
DOI: 10.1117/12.279403
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