High-sensitivity photon emission microscope system with continuous wavelength spectroscopic capability

Abstract

A new spectroscopic photon emission microscope system (SPEMS) with high-sensitivity and continuous wavelength spectroscopic capability is presented. With the specially-designed light collection and transmission optics, high-resolution spectral characteristics can be acquired from very low-level light emissions. Two new wavelength parameters have been introduced to describe the bias-dependent spectral variation. The potential use of these two parameters as well as the spectral characteristics to identify failure mechanisms is also discussed.