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https://scholarbank.nus.edu.sg/handle/10635/72520
Title: | Charging identification and compensation in the scanning electron microscope | Authors: | Wong, W.K. Thong, J.T.L. Phang, J.C.H. |
Issue Date: | 1997 | Citation: | Wong, W.K.,Thong, J.T.L.,Phang, J.C.H. (1997). Charging identification and compensation in the scanning electron microscope. Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA : 97-102. ScholarBank@NUS Repository. | Abstract: | Common charging artifacts in the Scanning Electron Microscope (SEM) are discussed. A novel method employing front-end control of the SEM beam voltage and scanning to achieve charging compensation was also discussed. Results show that the new technique is effective in reducing highly-negative charging as well as providing a means for the experimental measurement of charging using the electrostatic mirror. | Source Title: | Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA | URI: | http://scholarbank.nus.edu.sg/handle/10635/72520 |
Appears in Collections: | Staff Publications |
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