Please use this identifier to cite or link to this item: https://doi.org/10.1116/1.3250202
Title: Toroidal spectrometer for signal detection in scanning ion/electron microscopes
Authors: Hoang, H.Q. 
Khursheed, A. 
Issue Date: 2009
Source: Hoang, H.Q., Khursheed, A. (2009). Toroidal spectrometer for signal detection in scanning ion/electron microscopes. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 27 (6) : 3226-3231. ScholarBank@NUS Repository. https://doi.org/10.1116/1.3250202
Abstract: This article presents a second-order focusing toroidal spectrometer/ detection system for scanning ion/electron microscopes. The spectrometer, combined with a prefocusing electrostatic lens, is predicted to have relative energy resolutions of 0.02% and 0.088% for emission angular spreads of ±6° and ±10°, respectively, corresponding to transmittances of around 20% and 34%. Initial experimental backscattered electron (BSE) spectra were recorded with a prototype toroidal spectrometer functioning as an attachment unit inside a conventional scanning electron microscope (SEM). These results were used to quantify SEM BSE material contrast. © 2009 American Vacuum Society.
Source Title: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
URI: http://scholarbank.nus.edu.sg/handle/10635/72041
ISSN: 10711023
DOI: 10.1116/1.3250202
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