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|Title:||Toroidal spectrometer for signal detection in scanning ion/electron microscopes|
|Authors:||Hoang, H.Q. |
|Source:||Hoang, H.Q., Khursheed, A. (2009). Toroidal spectrometer for signal detection in scanning ion/electron microscopes. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 27 (6) : 3226-3231. ScholarBank@NUS Repository. https://doi.org/10.1116/1.3250202|
|Abstract:||This article presents a second-order focusing toroidal spectrometer/ detection system for scanning ion/electron microscopes. The spectrometer, combined with a prefocusing electrostatic lens, is predicted to have relative energy resolutions of 0.02% and 0.088% for emission angular spreads of ±6° and ±10°, respectively, corresponding to transmittances of around 20% and 34%. Initial experimental backscattered electron (BSE) spectra were recorded with a prototype toroidal spectrometer functioning as an attachment unit inside a conventional scanning electron microscope (SEM). These results were used to quantify SEM BSE material contrast. © 2009 American Vacuum Society.|
|Source Title:||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Appears in Collections:||Staff Publications|
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