Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.phpro.2008.07.092
Title: The energy dispersion characteristics of a magnetic beam separator
Authors: Hoang, H.Q. 
Khursheed, A. 
Keywords: Electron energy loss spectroscopy
Energy dispersion
Magnetic separator
Issue Date: Aug-2008
Citation: Hoang, H.Q., Khursheed, A. (2008-08). The energy dispersion characteristics of a magnetic beam separator. Physics Procedia 1 (1) : 161-166. ScholarBank@NUS Repository. https://doi.org/10.1016/j.phpro.2008.07.092
Abstract: This paper presents an energy spectrometer design for scanning electron microscopy, where the spectrum of secondary, Auger and backscattered electrons can be captured at the same time. The spectrometer is based upon the use of a magnetic sector beam separator that deflects the primary beam while dispersing the scattered electrons. A series of retarding field magnetic sector post-deflectors is used to focus the scattered electrons on to a multi-channel detector plane. Initial simulation results predict that prefocusing the scattered electrons into the beam separator via a transfer lens will significantly reduce the effect of angular dispersion and improve the beam separator spectrometer's energy resolution. © 2008 Elsevier B.V. All rights reserved.
Source Title: Physics Procedia
URI: http://scholarbank.nus.edu.sg/handle/10635/71976
ISSN: 18753884
DOI: 10.1016/j.phpro.2008.07.092
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

1
checked on Dec 13, 2018

Page view(s)

42
checked on Nov 3, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.