Please use this identifier to cite or link to this item: https://doi.org/10.1109/IPFA.2009.5232707
Title: Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis
Authors: Phang, J.C.H. 
Gohl, S.H.
Quah, A.C.T.
Chua, M.
Koh, L.S.
Tan, S.H.
Chua, W.P.
Issue Date: 2009
Source: Phang, J.C.H.,Gohl, S.H.,Quah, A.C.T.,Chua, M.,Koh, L.S.,Tan, S.H.,Chua, W.P. (2009). Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 11-18. ScholarBank@NUS Repository. https://doi.org/10.1109/IPFA.2009.5232707
Abstract: Scanning optical microscopy techniques are effective for optical fault localization of failures that are sensitive to thermal stimulation. In this paper, the recent developments in resolution and sensitivity enhancements that allow these techniques to be used with advanced technology nodes are described. The enhancement methods include refractive solid immersion lens technology, de-coupling of the laser induced detection system and laser pulsing with signal integration algorithm. The combination of these enhanced scanning optical microscopy techniques and refractive solid immersion lens technology has brought about significantly better localization precision and sensitivity. ©2009 IEEE.
Source Title: Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
URI: http://scholarbank.nus.edu.sg/handle/10635/71626
ISBN: 9781424439102
DOI: 10.1109/IPFA.2009.5232707
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

4
checked on Dec 11, 2017

Page view(s)

28
checked on Dec 9, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.