Please use this identifier to cite or link to this item: https://doi.org/10.1109/IRPS.2009.5173354
Title: Reliable and accurate temperature measurement using scanning thermal microscopy with double lock-in amplification
Authors: Ho, H.W.
Zheng, X.H.
Phang, J.C.H. 
Balk, L.J.
Keywords: Double lock-in
Localized temperature
Scanning thermal microscopy
Issue Date: 2009
Source: Ho, H.W., Zheng, X.H., Phang, J.C.H., Balk, L.J. (2009). Reliable and accurate temperature measurement using scanning thermal microscopy with double lock-in amplification. IEEE International Reliability Physics Symposium Proceedings : 804-807. ScholarBank@NUS Repository. https://doi.org/10.1109/IRPS.2009.5173354
Abstract: A scanning thermal microscopy (SThM) technique incorporating double lock-in amplification is developed to minimize temperature drift and artifacts due to probe-sample contact area. The localized temperature change of an interconnect biased with a switching current supply is measured with improved signal level and a significant reduction of topographic artifacts. ©2009 IEEE.
Source Title: IEEE International Reliability Physics Symposium Proceedings
URI: http://scholarbank.nus.edu.sg/handle/10635/71609
ISBN: 0780388038
ISSN: 15417026
DOI: 10.1109/IRPS.2009.5173354
Appears in Collections:Staff Publications

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