Please use this identifier to cite or link to this item: https://doi.org/10.1109/INDUSIS.2010.5565873
Title: Problem and solution of designing an air bearing system
Authors: Tan, K.K. 
Huang, S. 
Keywords: Adaptive control
Air bearing systems
Eddy current damping
Nano-imprinting
Issue Date: 2010
Source: Tan, K.K.,Huang, S. (2010). Problem and solution of designing an air bearing system. 2010 2nd International Conference on Industrial and Information Systems, IIS 2010 1 : 212-215. ScholarBank@NUS Repository. https://doi.org/10.1109/INDUSIS.2010.5565873
Abstract: In this paper, we present the structure and design of an air bearing stage. First, a spherical air bearing system (SABS) is introduced in the alignment of nano-imprinting. Secondly, the eddy current is used to control the SABS overcoming the frictionless motion. Thirdly, an adaptive algorithm is designed for estimating the unknown model parameters. Finally, an experimental platform is setup and the proposed algorithm is tested. © 2010 IEEE.
Source Title: 2010 2nd International Conference on Industrial and Information Systems, IIS 2010
URI: http://scholarbank.nus.edu.sg/handle/10635/71510
ISBN: 9781424482177
DOI: 10.1109/INDUSIS.2010.5565873
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