Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2010.01.006
Title: Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors
Authors: Mai, T.T.
Hsiao, F.-L. 
Lee, C. 
Xiang, W. 
Chen, C.-C.
Choi, W.K. 
Keywords: MEMS
Microcantilever
Nano-ring
Nanomechanical sensor
NEMS
Photonic crystal resonator
Issue Date: Jan-2011
Source: Mai, T.T., Hsiao, F.-L., Lee, C., Xiang, W., Chen, C.-C., Choi, W.K. (2011-01). Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors. Sensors and Actuators, A: Physical 165 (1) : 16-25. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2010.01.006
Abstract: Microcantilever sensors have been known as a fundamental design used in force sensors, strain sensors and biochemical sensors. The fast-growing applications in nanoelectromechanical systems (NEMS) lead to strong demands in new sensing mechanism in order to downsize the sensing elements to nanometer scale. Photonic crystal (PC) based resonators have been investigated as promising solutions because the bandgap structure and resonator characteristics are extremely sensitive to the deformation and position shift of holes in PC resonators. In addition to the well-known nano-cavity resonator (NCR), we proposed hexagonal nano-ring resonators (NRR) of two different layout configurations. When a microcantilever under different force loads, both of the resonant wavelength and the resonant wavelength shift can be measured as a linear function of force load. The linear relationship between wavelength shifts and strain is observed as well. The minimum detectable force and detectable strain for NRR configuration 1 is derived as small as 0.0757 μN and 0.0023%. The outstanding sensing capability renders PC resonators as a promising nanomechanical sensing element to be integrated in various transducers for NEMS applications. © 2010 Elsevier B.V. All rights reserved.
Source Title: Sensors and Actuators, A: Physical
URI: http://scholarbank.nus.edu.sg/handle/10635/71313
ISSN: 09244247
DOI: 10.1016/j.sna.2010.01.006
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

52
checked on Dec 14, 2017

WEB OF SCIENCETM
Citations

2
checked on Nov 18, 2017

Page view(s)

30
checked on Dec 17, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.