Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2007.4373828
Title: Optical NEMS based force sensor using silicon nanophotonics
Authors: Lee, C. 
Radhakrishnan, R.
Chen, C.-C.
Li, J.
Balasubramanian, N.
Keywords: Force
Nanophotonics
Optical NEMS
Sensor
Strain
Issue Date: 2007
Source: Lee, C., Radhakrishnan, R., Chen, C.-C., Li, J., Balasubramanian, N. (2007). Optical NEMS based force sensor using silicon nanophotonics. 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS : 37-38. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2007.4373828
Abstract: A line defect in a silicon two-dimensional (2-D) photonic crystal (PhC) is created as a waveguide for light propagation via the PhC. By introducing micro-cavities within the line defect so as to form the resonant band gap structure for PhC, we demonstrate a PhC waveguide (PhCWG) filter with clear resonant peak in output wavelength spectrum. We conceptualized a novel nanomechanical beam structure embedded with this PhCWG filter, i.e., a NEMS (Nanoelectromechanical system) based force sensor. Since the output resonant wavelength is sensitive to the shape of air holes and defect length of the micro-cavity. Shift of the output resonant wavelength is correlated with beam deformation or force loading for this free-standing PhCWG beam. Simply speaking, the induced strain modifies the shape of air holes and the spacing among them for micro-cavities along the silicon waveguide of PhCWG. For a silicon PhCWG beam structure with dimension of 340nm(thickness) × 5μm(width) × 20μm(length), the measurable vertical deformation of 20-25 nm at the center and detectable strain of defect length of 0.004% is derived according to simulation results. ©2007 IEEE.
Source Title: 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
URI: http://scholarbank.nus.edu.sg/handle/10635/71272
ISBN: 1424406412
DOI: 10.1109/OMEMS.2007.4373828
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