Please use this identifier to cite or link to this item: https://doi.org/10.1109/FREQ.2008.4623079
Title: Nonlinear behavior of Lamé-mode SOI bulk resonator
Authors: Shao, L.C.
Palaniapan, M. 
Khine, L.
Tan, W.W. 
Issue Date: 2008
Source: Shao, L.C., Palaniapan, M., Khine, L., Tan, W.W. (2008). Nonlinear behavior of Lamé-mode SOI bulk resonator. 2008 IEEE International Frequency Control Symposium, FCS : 646-650. ScholarBank@NUS Repository. https://doi.org/10.1109/FREQ.2008.4623079
Abstract: In this paper, we report for the first time the detailed analysis of the nonlinear behavior of a Lamé-mode SOI bulk resonator. The measured resonant frequency of the resonator was 6.35MHz with a quality factor of 1.7 million in the ambient pressure of 0.02Pa. We used the two-step semi-analytic approach to characterize the model parameters of the resonator and the nonlinear model of the resonator was verified by the experimental results. Our study shows that the Lamé-mode bulk resonator has three orders of magnitude larger maximum energy storage capability than the flexural beam resonator, leading to improved overall phase noise performance of the resonator-based oscillator. © 2008 IEEE.
Source Title: 2008 IEEE International Frequency Control Symposium, FCS
URI: http://scholarbank.nus.edu.sg/handle/10635/71152
ISBN: 9781424417957
DOI: 10.1109/FREQ.2008.4623079
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