Please use this identifier to cite or link to this item: https://doi.org/10.1109/SENSOR.2007.4300145
Title: Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization
Authors: Wong, W.-K. 
Wong, C.-L.
Palaniapan, M. 
Tay, F.E.H. 
Keywords: Acoustic phonons
Non-destructive testing
Resonators
RF switches
SEM
Issue Date: 2007
Source: Wong, W.-K.,Wong, C.-L.,Palaniapan, M.,Tay, F.E.H. (2007). Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems : 371-374. ScholarBank@NUS Repository. https://doi.org/10.1109/SENSOR.2007.4300145
Abstract: This paper introduces a novel technique for dynamic motion characterization of microelectromechanical (MEMS) devices such as resonators, switches, micromirrors, accelerometers and gyroscopes. Due to the favorable generation and transmission of acoustic phonons through solids, characterization of individual MEMS devices for both dies and packaged devices can be attained noninvasively. Hence, this technique can be utilized for high volume wafer and package-level testing in MEMS manufacturing, allowing new test functionalities and cost economies in back-end wafer and package yield screens to be attained. ©2007 IEEE.
Source Title: TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
URI: http://scholarbank.nus.edu.sg/handle/10635/71149
ISBN: 1424408423
DOI: 10.1109/SENSOR.2007.4300145
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