Please use this identifier to cite or link to this item: https://doi.org/10.1109/TII.2010.2040285
Title: Multi-zone thermal processing in semiconductor manufacturing: Bias estimation
Authors: Yan, H.
Ho, W.K. 
Ling, K.V.
Lim, K.W.
Keywords: Multi-zone
Robust bias estimator
Semiconductor manufacturing
Sensor bias
Issue Date: May-2010
Source: Yan, H., Ho, W.K., Ling, K.V., Lim, K.W. (2010-05). Multi-zone thermal processing in semiconductor manufacturing: Bias estimation. IEEE Transactions on Industrial Informatics 6 (2) : 216-228. ScholarBank@NUS Repository. https://doi.org/10.1109/TII.2010.2040285
Abstract: Temperature uniformities within a wafer and from wafer to wafer have significant impact on the smallest feature size or critical dimension of integrated circuits. These are important issues with stringent specifications. To obtain temperature uniformity, a wafer is heated by multiple independently controlled heating elements simultaneously. The accuracy of temperature sensing is hence an important issue. In this paper, sensor bias is estimated for the difficult problem where measurement outliers are close to good data such that they cannot be separated easily. Equations are derived to predict the variance of the estimates from sample size. This information enables the selection of an efficient estimator. Sensor bias estimation efficiency translates into earlier bias removal and less faulty wafers. The theory is verified experimentally in a multi-zone thermal system for semiconductor wafer processing. © 2006 IEEE.
Source Title: IEEE Transactions on Industrial Informatics
URI: http://scholarbank.nus.edu.sg/handle/10635/71078
ISSN: 15513203
DOI: 10.1109/TII.2010.2040285
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