Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/70964
Title: Mobile diffractive solid immersion lens design for backside laser based fault localization
Authors: Goh, S.H.
Cho, J.Y.
Lam, J.
Phang, J.C.H. 
Issue Date: 2010
Source: Goh, S.H.,Cho, J.Y.,Lam, J.,Phang, J.C.H. (2010). Mobile diffractive solid immersion lens design for backside laser based fault localization. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 32-37. ScholarBank@NUS Repository.
Abstract: In this paper, a mobile Diffractive Solid Immersion Lens (mDSIL) design is proposed to enhance spatial resolution for backside laser fault isolation techniques. By allowing for multiple failure sites analysis using a single DSIL, this design improves conventional static DSIL directly fabricated on silicon substrate. The feasibility of mDSIL is demonstrated experimentally and the resolution performance is shown to be comparable to a static DSIL. Copyright © 2010 ASM International® All rights reserved.
Source Title: Conference Proceedings from the International Symposium for Testing and Failure Analysis
URI: http://scholarbank.nus.edu.sg/handle/10635/70964
ISBN: 9781615030415
Appears in Collections:Staff Publications

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