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|Title:||Mobile diffractive solid immersion lens design for backside laser based fault localization|
|Source:||Goh, S.H.,Cho, J.Y.,Lam, J.,Phang, J.C.H. (2010). Mobile diffractive solid immersion lens design for backside laser based fault localization. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 32-37. ScholarBank@NUS Repository.|
|Abstract:||In this paper, a mobile Diffractive Solid Immersion Lens (mDSIL) design is proposed to enhance spatial resolution for backside laser fault isolation techniques. By allowing for multiple failure sites analysis using a single DSIL, this design improves conventional static DSIL directly fabricated on silicon substrate. The feasibility of mDSIL is demonstrated experimentally and the resolution performance is shown to be comparable to a static DSIL. Copyright © 2010 ASM International® All rights reserved.|
|Source Title:||Conference Proceedings from the International Symposium for Testing and Failure Analysis|
|Appears in Collections:||Staff Publications|
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