Please use this identifier to cite or link to this item: https://doi.org/10.1109/OECC.2012.6276561
Title: MEMS-based devices
Authors: Lee, C. 
Issue Date: 2012
Source: Lee, C. (2012). MEMS-based devices. Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012 : 539-540. ScholarBank@NUS Repository. https://doi.org/10.1109/OECC.2012.6276561
Abstract: Novel actuation mechanisms for optical MEMS devices have been developed for scanning mirrors and variable optical attenuation (VOA) applications. Recent progress in optical MEMS is highlighted as well. © 2012 IEEE.
Source Title: Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012
URI: http://scholarbank.nus.edu.sg/handle/10635/70913
ISBN: 9781467309776
DOI: 10.1109/OECC.2012.6276561
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