Please use this identifier to cite or link to this item:
https://doi.org/10.1109/OECC.2012.6276561
| Title: | MEMS-based devices | Authors: | Lee, C. | Issue Date: | 2012 | Citation: | Lee, C. (2012). MEMS-based devices. Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012 : 539-540. ScholarBank@NUS Repository. https://doi.org/10.1109/OECC.2012.6276561 | Abstract: | Novel actuation mechanisms for optical MEMS devices have been developed for scanning mirrors and variable optical attenuation (VOA) applications. Recent progress in optical MEMS is highlighted as well. © 2012 IEEE. | Source Title: | Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012 | URI: | http://scholarbank.nus.edu.sg/handle/10635/70913 | ISBN: | 9781467309776 | DOI: | 10.1109/OECC.2012.6276561 |
| Appears in Collections: | Staff Publications |
Show full item record
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.