Laser writing of nanostructures on magnetic film surfaces with optical near field effects

Abstract

Laser directly writing of nanostrucrures on magnetic film surfaces with optical near field effects has been investigated. Spherical 0.99 μm or 0.47 μm silica particles were placed on Cr/CoCrPt multilayers. After laser illumination with an excimer laser for a single shot, pits were obtained at the original position of the particles using different laser fluences or particle size parameters. The mechanism of the formation of nanostructure pattern was discussed and found to be the near-field optical resonance effect induced by particles on the surface. A comparison with accurate theoretical calculations of near-field light intensity distribution showed good agreement with the experiment results. The method of particle enhanced laser irradiation allows the study of field enhancement effects as well as its potential applications for nanolithography.