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|Title:||Laser microprocessing in microelectronics, data storage and photonics|
|Authors:||Lu, Y.F. |
Laser mold cleaning
Laser-induced periodic structures
Ultrashallow pn junction
|Citation:||Lu, Y.F., Song, W.D., Ren, Z.M., An, C.W., Liu, D.M., Huang, S.M., Wang, W.J., Hong, M.H., Chong, T.C., Cho, B.J., Zeng, J.N., Tan, C.F. (2002). Laser microprocessing in microelectronics, data storage and photonics. Proceedings of SPIE - The International Society for Optical Engineering 4760 (I) : 211-222. ScholarBank@NUS Repository. https://doi.org/10.1117/12.482088|
|Abstract:||Laser microprocessing has been extensively studies with applications in microelectronics, data storage and photonics. In addition to the fundamental aspects of laser materials interactions, we have investigated various applications of laser microprocessing in different areas. Laser cleaning has been studies systematically both theoretically and experimentally for dry surface cleaning and steam surface cleaning. This technology has been applied for cleaning magnetic head, magnetic sliders, suspension, laser mold cleaning and laser deflash for IC packages. Laser texturing and related processes such as laser bumping, laser tagging have been studied for magnetic recording applications. The other laser works include real-time monitoring of laser surface processing, laser-induced controllable periodic structures, laser nanopatterning by scanning probe microscope tip-enhanced laser irradiation. The further prospects of using laser microprocessing for applications in formation of ultrashallow (less than 50 nm) pn junction for next-generation MOS devices, laser generation of Si nanoparticles for quantum-dot flash memory and light emission devices are addressed.|
|Source Title:||Proceedings of SPIE - The International Society for Optical Engineering|
|Appears in Collections:||Staff Publications|
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