Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.904387
Title: Laser microprocessing and nanoengineering of large-area functional micro/nanostructures
Authors: Tang, M. 
Xie, X.Z.
Yang, J. 
Chen, Z.C.
Xu, L.
Choo, Y.S. 
Hong, M.H. 
Keywords: Functional micro/nanostructures
Laser microprocessing and nanoengineering
Microlens array
Super-hydrophobic surface
Surface plasmonic resonance
Issue Date: 2011
Source: Tang, M., Xie, X.Z., Yang, J., Chen, Z.C., Xu, L., Choo, Y.S., Hong, M.H. (2011). Laser microprocessing and nanoengineering of large-area functional micro/nanostructures. Proceedings of SPIE - The International Society for Optical Engineering 8204 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.904387
Abstract: Laser microprocessing and nanoengineering are of great interest to both scientists and engineers, since the inspired properties of functional micro/nanostructures over large areas can lead to numerous unique applications. Currently laser processing systems combined with high speed automation ensure the focused laser beam to process various materials at a high throughput and a high accuracy over large working areas. UV lasers are widely used in both laser microprocessing and nanoengineering. However by improving the processing methods, green pulsed laser is capable of replacing UV lasers to make high aspect ratio micro-grooves on fragile and transparent sapphire substrates. Laser micro-texturing can also tune the wetting property of metal surfaces from hydrophilic to super-hydrophobic at a contact angle of 161° without chemical coating. Laser microlens array (MLA) can split a laser beam into multiple laser beams and reduce the laser spot size down to sub-microns. It can be applied to fabricate split ring resonator (SRR) meta-materials for THz sensing, surface plasmonic resonance (SPR) structures for NIR and molding tools for soft lithography. Furthermore, laser interference lithography combined with thermal annealing can obtain a large area of sub-50nm nano-dot clusters used for SPR applications. © 2011 SPIE.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/70761
ISBN: 9780819488459
ISSN: 0277786X
DOI: 10.1117/12.904387
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