Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.482051
Title: Laser assisted nanofabrications on metal surfaces with optical near field effects
Authors: Huang, S.M.
Hong, M.H. 
Lukiyanchuk, B.
Lu, Y.F. 
Issue Date: 2002
Source: Huang, S.M., Hong, M.H., Lukiyanchuk, B., Lu, Y.F. (2002). Laser assisted nanofabrications on metal surfaces with optical near field effects. Proceedings of SPIE - The International Society for Optical Engineering 4760 (I) : 185-191. ScholarBank@NUS Repository. https://doi.org/10.1117/12.482051
Abstract: Laser directly writing of nanostrucrures on metal film surfaces with optical near field effects has been investigated. Spherical silica particles (500 - 1000 nm) were placed on metal films. After laser illumination with a pulsed ultraviolet laser, naoholes were obtained at the original position of the particles. The mechanism of the formation of nanostructure pattern was investigated and found to be the near-field optical resonance effect induced by particles on the surface. The size of the nanohole has been studied as a function of laser fluence and silica particle size. A comparison with relative theoretical calculations of near-field light intensity distribution showed good agreement with the experiment results. The method of particle enhanced laser irradiation allows the study of field enhancement effects as well as its potential applications for nanolithography.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/70759
ISSN: 0277786X
DOI: 10.1117/12.482051
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