Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nima.2010.12.010
Title: Experimental results from a second-order focusing toroidal energy spectrometer attachment for scanning electron microscopes
Authors: Hoang, H.Q. 
Osterberg, M. 
Khursheed, A. 
Keywords: Energy electron spectrometer
Scanning electron microscopy
Toroidal spectrometer
Issue Date: 21-Jul-2011
Source: Hoang, H.Q., Osterberg, M., Khursheed, A. (2011-07-21). Experimental results from a second-order focusing toroidal energy spectrometer attachment for scanning electron microscopes. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 645 (1) : 241-244. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nima.2010.12.010
Abstract: This paper presents experimental results from a second-order focusing toroidal spectrometer attachment for the scanning electron microscope (SEM). The energy resolution of the spectrometer is measured to be 0.38% for an angular spread of ±8°, close to the numerical simulated value of 0.32% based upon direct ray tracing. This result provides experimental confirmation of the superior focusing optics predicted for the spectrometer. Examples of secondary electron (SE) and backscattered electron (BSE) spectra acquired by the attachment are also presented. © 2010 Elsevier B.V. Allrights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
URI: http://scholarbank.nus.edu.sg/handle/10635/70251
ISSN: 01689002
DOI: 10.1016/j.nima.2010.12.010
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