Please use this identifier to cite or link to this item:
https://doi.org/10.1016/j.nima.2010.12.010
| Title: | Experimental results from a second-order focusing toroidal energy spectrometer attachment for scanning electron microscopes | Authors: | Hoang, H.Q. Osterberg, M. Khursheed, A. |
Keywords: | Energy electron spectrometer Scanning electron microscopy Toroidal spectrometer |
Issue Date: | 21-Jul-2011 | Citation: | Hoang, H.Q., Osterberg, M., Khursheed, A. (2011-07-21). Experimental results from a second-order focusing toroidal energy spectrometer attachment for scanning electron microscopes. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 645 (1) : 241-244. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nima.2010.12.010 | Abstract: | This paper presents experimental results from a second-order focusing toroidal spectrometer attachment for the scanning electron microscope (SEM). The energy resolution of the spectrometer is measured to be 0.38% for an angular spread of ±8°, close to the numerical simulated value of 0.32% based upon direct ray tracing. This result provides experimental confirmation of the superior focusing optics predicted for the spectrometer. Examples of secondary electron (SE) and backscattered electron (BSE) spectra acquired by the attachment are also presented. © 2010 Elsevier B.V. Allrights reserved. | Source Title: | Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | URI: | http://scholarbank.nus.edu.sg/handle/10635/70251 | ISSN: | 01689002 | DOI: | 10.1016/j.nima.2010.12.010 |
| Appears in Collections: | Staff Publications |
Show full item record
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.