Please use this identifier to cite or link to this item: https://doi.org/10.1109/IRPS.2009.5173273
Title: Electron beam induced temperature oscillation for qualitative thermal conductivity analysis by an SThM / ESEM-hybrid-system
Authors: Tiedemann, A.-K.
Heiderhoff, R.
Balk, L.J.
Phang, J.C.H. 
Keywords: Hybrid-system
Near-field
SThM
Temperature distribution
Thermal conductivity
Issue Date: 2009
Source: Tiedemann, A.-K., Heiderhoff, R., Balk, L.J., Phang, J.C.H. (2009). Electron beam induced temperature oscillation for qualitative thermal conductivity analysis by an SThM / ESEM-hybrid-system. IEEE International Reliability Physics Symposium Proceedings : 327-332. ScholarBank@NUS Repository. https://doi.org/10.1109/IRPS.2009.5173273
Abstract: A hybrid-system consisting of a Scanning Thermal Microscope and an Environmental Scanning Electron Microscope is used to analyze directional thermal conductivity mechanisms. An electron beam stimulates locally variable hot spots, whereas a thermal probe is used as a locally resolving detector. The detected temperature oscillation strongly depends both on the local thermal conductivity and on the directivity of the heat transport within the investigated sample. This may allow analysis of linear structures like interfaces within materials. ©2009 IEEE.
Source Title: IEEE International Reliability Physics Symposium Proceedings
URI: http://scholarbank.nus.edu.sg/handle/10635/70147
ISBN: 0780388038
ISSN: 15417026
DOI: 10.1109/IRPS.2009.5173273
Appears in Collections:Staff Publications

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