Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0169-4332(02)00425-7
Title: Effect of deposition conditions on optical and electrical properties of ZnO films prepared by pulsed laser deposition
Authors: Zeng, J.N. 
Low, J.K.
Ren, Z.M.
Liew, T. 
Lu, Y.F. 
Keywords: Pulsed laser deposition
Raman spectroscopy
Sheet resistivity
Transmittance spectra
X-ray diffraction
Zinc oxide
Issue Date: 2002
Source: Zeng, J.N., Low, J.K., Ren, Z.M., Liew, T., Lu, Y.F. (2002). Effect of deposition conditions on optical and electrical properties of ZnO films prepared by pulsed laser deposition. Applied Surface Science 197-198 : 362-367. ScholarBank@NUS Repository. https://doi.org/10.1016/S0169-4332(02)00425-7
Abstract: We report the optical and electrical properties for highly c-axis oriented ZnO films deposited on Si (0 0 1) and quartz substrates by pulsed laser deposition (PLD) under various deposition conditions such as substrate temperature, laser fluence and oxygen ambient pressure. Dependence of structural, optical and electrical measurements on the substrate temperature reveals improvement of crystalline quality of ZnO films with raising substrate temperature. Optical and electrical properties show different behaviors in vacuum and oxygen ambient with increasing laser fluence. Combined with high laser fluence, oxygen ambient plays an important role in removing defects due to excess zinc or oxygen vacancy. © 2002 Elsevier Science B.V. All rights reserved.
Source Title: Applied Surface Science
URI: http://scholarbank.nus.edu.sg/handle/10635/70069
ISSN: 01694332
DOI: 10.1016/S0169-4332(02)00425-7
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