Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.egypro.2012.02.028
Title: Doped microcrystalline silicon layers for solar cells by 13.56 MHz plasma-enhanced chemical vapour deposition
Authors: Long, J. 
Yin, Y.
Sian, S.Y.R.
Ren, Z.
Wang, J.
Vayalakkara, P.
Venkataraj, S.
Aberle, A.G. 
Keywords: Crystallinity
Doped microcrystalline silicon
Silicon thin-film solar cells
Thin films
Issue Date: 2012
Source: Long, J., Yin, Y., Sian, S.Y.R., Ren, Z., Wang, J., Vayalakkara, P., Venkataraj, S., Aberle, A.G. (2012). Doped microcrystalline silicon layers for solar cells by 13.56 MHz plasma-enhanced chemical vapour deposition. Energy Procedia 15 : 240-247. ScholarBank@NUS Repository. https://doi.org/10.1016/j.egypro.2012.02.028
Abstract: Doped hydrogenated microcrystalline silicon thin films play a critical role in multi-junction thin-film silicon solar cells, because their crystallinity has a large influence on the properties of intrinsic microcrystalline silicon absorber layers grown on them. The doping efficiency of the doped layers depends strongly on their crystallinity and hence a high-crystallinity doped layer is desired. In this study, highly crystalline doped microcrystalline silicon films are formed on 300 mm × 400 mm glass substrates using a conventional parallel-plate PECVD reactor operated at 13.56 MHz. Raman spectroscopy is used to analyse the crystallinity of the films. The conductivity of the films is measured using the co-planar electrode method. The effects of the deposition parameters on the Raman crystallinity and conductivity of the doped films are investigated. The RF power is found to play a key role for achieving a high crystallinity in the doped layers, whereby a high crystallinity can only be obtained within a narrow RF power range. The influence of the RF power on the lateral thickness uniformity of the deposited films is also examined. It is found that the RF power has a strong influence on the lateral uniformity of the deposited films, with intermediate power giving the best thickness uniformity. © 2011 Published by Elsevier Ltd.
Source Title: Energy Procedia
URI: http://scholarbank.nus.edu.sg/handle/10635/70008
ISSN: 18766102
DOI: 10.1016/j.egypro.2012.02.028
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