Please use this identifier to cite or link to this item: https://doi.org/10.1109/NEMS.2009.5068699
Title: Development of vacuum packaged CMOS thermoelectric energy harvester
Authors: Lee, C. 
Xie, J.
Keywords: Energy harvester
MEMS
Power generator
Thermoelectric
Issue Date: 2009
Source: Lee, C., Xie, J. (2009). Development of vacuum packaged CMOS thermoelectric energy harvester. 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 : 803-807. ScholarBank@NUS Repository. https://doi.org/10.1109/NEMS.2009.5068699
Abstract: A new concept of MEMS based thermoelectric power generator (TPG) is investigated in this study. By using solder based wafer bonding technology, we can bond three pieces of wafers to form vacuum packaged TPG. According to the finite element method and analytical modeling results, the output power per area of device is derived as 68.6 J1W/cm2 for temperature difference of 6°C between two ends of thermocouple junctions. It shows that the proposed device concept is an effective and low cost approach to enhance the output voltage. © 2009 IEEE.
Source Title: 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
URI: http://scholarbank.nus.edu.sg/handle/10635/69928
ISBN: 9781424446308
DOI: 10.1109/NEMS.2009.5068699
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