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|Title:||Development of vacuum packaged CMOS thermoelectric energy harvester|
|Authors:||Lee, C. |
|Citation:||Lee, C., Xie, J. (2009). Development of vacuum packaged CMOS thermoelectric energy harvester. 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 : 803-807. ScholarBank@NUS Repository. https://doi.org/10.1109/NEMS.2009.5068699|
|Abstract:||A new concept of MEMS based thermoelectric power generator (TPG) is investigated in this study. By using solder based wafer bonding technology, we can bond three pieces of wafers to form vacuum packaged TPG. According to the finite element method and analytical modeling results, the output power per area of device is derived as 68.6 J1W/cm2 for temperature difference of 6°C between two ends of thermocouple junctions. It shows that the proposed device concept is an effective and low cost approach to enhance the output voltage. © 2009 IEEE.|
|Source Title:||4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009|
|Appears in Collections:||Staff Publications|
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