Please use this identifier to cite or link to this item: https://doi.org/10.1109/NEMS.2012.6196785
Title: Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab
Authors: Wang, N.
Hsiao, F.-L.
Palaniapan, M.
Lee, C. 
Keywords: CMOS-compatible
Microelectromechanical Systems (MEMS)
phononic crystal
resonator
Issue Date: 2012
Source: Wang, N.,Hsiao, F.-L.,Palaniapan, M.,Lee, C. (2012). Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab. 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 : 326-330. ScholarBank@NUS Repository. https://doi.org/10.1109/NEMS.2012.6196785
Abstract: This paper shows the design, fabrication and characterization of novel micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab. The PnC slab was made by etching a square array of cylindrical air holes in a 10μm thick free-standing silicon plate, while the defects are created by replacing periodically arranged three rows of air holes with one row of air holes at the centre of the PnC region. The radius of the central air holes (r') is also varied to study the effect of r' on the performance of the PnC resonators. Piezoelectric aluminium nitride (AlN) film is employed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a pure PnC structure with a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators reaches its maximum value (174.67MHz) when central-hole radius (r') reaches 8μm, while Q factor reaches maximum (893) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics and may be further optimized for applications such as microfluidics, biomedical devices and RF communications in GHz range. © 2012 IEEE.
Source Title: 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
URI: http://scholarbank.nus.edu.sg/handle/10635/69925
ISBN: 9781467311243
DOI: 10.1109/NEMS.2012.6196785
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