Please use this identifier to cite or link to this item: https://doi.org/10.1109/NEMS.2013.6559908
Title: Development of flexible neural probes using SU-8/parylene
Authors: Xiang, Z.
Wang, H.
Zhang, S.
Yen, S.-C. 
Je, M.
Tsang, W.M.
Xu, Y.-P. 
Thakor, N.V.
Kwong, D.-L.
Lee, C. 
Keywords: electrode
Neural probe
parylene
SU-8
Issue Date: 2013
Source: Xiang, Z.,Wang, H.,Zhang, S.,Yen, S.-C.,Je, M.,Tsang, W.M.,Xu, Y.-P.,Thakor, N.V.,Kwong, D.-L.,Lee, C. (2013). Development of flexible neural probes using SU-8/parylene. 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 : 1076-1079. ScholarBank@NUS Repository. https://doi.org/10.1109/NEMS.2013.6559908
Abstract: A new process for making SU-8 neural probe with fluidic channels and gold electrodes based on multi-layered thin parylene and SU-8 is presented here. This approach can realize a thin 15 μm gap between electrode surface and neural cells. The thin gap will help to enhance the neural signal acquisition. Fluidic testing and mechanical testing are conducted to ensure the device reliability. © 2013 IEEE.
Source Title: 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
URI: http://scholarbank.nus.edu.sg/handle/10635/69919
ISBN: 9781467363525
DOI: 10.1109/NEMS.2013.6559908
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