Please use this identifier to cite or link to this item: https://doi.org/10.1109/ICMA.2012.6285119
Title: Development for precise positioning of air bearing stages
Authors: Tan, K.K. 
Huang, S. 
Liang, W.
Yu, S.
Keywords: Air bearing system
control
eddy current
magnetic field
Issue Date: 2012
Source: Tan, K.K.,Huang, S.,Liang, W.,Yu, S. (2012). Development for precise positioning of air bearing stages. 2012 IEEE International Conference on Mechatronics and Automation, ICMA 2012 : 1943-1948. ScholarBank@NUS Repository. https://doi.org/10.1109/ICMA.2012.6285119
Abstract: In this paper, we propose control approaches for air bearing stages. First, we consider the case in which air bearing system is a linear stage. A control scheme incoporated with eddy current braking is proposed, where two control inputs are introduced to handle the nonlinear air bearing system. Secondly, we consider the case in which air bearing system is a spherical stage. The control scheme involves Kalman filter and optimal control designs. Finally, experimental results are given to further verify the effectiveness of the proposed methods. © 2012 IEEE.
Source Title: 2012 IEEE International Conference on Mechatronics and Automation, ICMA 2012
URI: http://scholarbank.nus.edu.sg/handle/10635/69904
ISBN: 9781467312776
DOI: 10.1109/ICMA.2012.6285119
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