Please use this identifier to cite or link to this item: https://doi.org/10.1116/1.3253611
Title: Design of a multiple-electron-beam imaging technique for surface inspection
Authors: Luo, T. 
Khursheed, A. 
Osterberg, M. 
Hoang, H. 
Issue Date: 2009
Source: Luo, T., Khursheed, A., Osterberg, M., Hoang, H. (2009). Design of a multiple-electron-beam imaging technique for surface inspection. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 27 (6) : 3256-3260. ScholarBank@NUS Repository. https://doi.org/10.1116/1.3253611
Abstract: This article presents a multiple-electron-beam imaging technique, which is able to simultaneously process images from multiple scanning sources. The proposal is based on the detection of wide-angle BSEs, whose spectrum is predicted to be largely confined to a sharp elastic peak at the primary electron beam energy, which remains unaltered even if the incident beam is tilted. When electron sources of different energies are used to illuminate the sample, the energy of wide-angle BSEs will be confined close to their respective primary beam energies. The wide-angle scattered electrons are then subsequently energy filtered to obtain separate images, which are formed by parallel energy mode acquisition at the detector plane. © 2009 American Vacuum Society.
Source Title: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
URI: http://scholarbank.nus.edu.sg/handle/10635/69852
ISSN: 10711023
DOI: 10.1116/1.3253611
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

24
checked on Dec 10, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.