Please use this identifier to cite or link to this item: https://doi.org/10.1109/IMNC.2007.4456110
Title: Demonstration of secondary electron detection using monolithic multi-channel electron detector
Authors: Tanimoto, S.
Pickard, D.S. 
Kenney, C.
Hasi, J.
Pease, R.F.W.
Issue Date: 2007
Source: Tanimoto, S.,Pickard, D.S.,Kenney, C.,Hasi, J.,Pease, R.F.W. (2007). Demonstration of secondary electron detection using monolithic multi-channel electron detector. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC : 72-73. ScholarBank@NUS Repository. https://doi.org/10.1109/IMNC.2007.4456110
Source Title: Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
URI: http://scholarbank.nus.edu.sg/handle/10635/69805
ISBN: 4990247248
DOI: 10.1109/IMNC.2007.4456110
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