Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2011.03.020
Title: Configuration analysis of sensing element for photonic crystal based NEMS cantilever using dual nano-ring resonator
Authors: Li, B.
Hsiao, F.-L. 
Lee, C. 
Keywords: Microcantilever
Nano-ring
Nanomechanical sensor
NEMS
Photonic crystal resonator
Issue Date: Oct-2011
Source: Li, B., Hsiao, F.-L., Lee, C. (2011-10). Configuration analysis of sensing element for photonic crystal based NEMS cantilever using dual nano-ring resonator. Sensors and Actuators, A: Physical 169 (2) : 352-361. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2011.03.020
Abstract: Photonic crystal (PhC) based channel drop filters including two hexagonal rings in a two dimensional (2-D) photonic crystal silicon slab of hexagonal lattice are integrated on microcantilevers for nanoelectromechanical systems (NEMS) sensor applications. The proposed two hexagonal rings are named as dual nano-ring (DNR) resonator. The sensing characteristics of dual nano-ring (DNR) resonator at various positions adjacent to the junction of the microcantilever and the substrate are investigated. The derived quality factors is over 3000, and the minimum detectable force can be as small as 7.58 nN. Moreover, the continuous wave field distribution modeling is deployed to explain the origins of resonant mechanisms occurred in deformed DNR resonator under various applied forces. © 2011 Elsevier B.V. © 2010 Elsevier B.V. All rights reserved.
Source Title: Sensors and Actuators, A: Physical
URI: http://scholarbank.nus.edu.sg/handle/10635/69694
ISSN: 09244247
DOI: 10.1016/j.sna.2011.03.020
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