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|Title:||Configuration analysis of sensing element for microcantilever sensor using dual nano-ring resonator|
|Citation:||Li, B.,Hsiao, F.-L.,Lee, C. (2010). Configuration analysis of sensing element for microcantilever sensor using dual nano-ring resonator. 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 : 181-182. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2010.5672125|
|Abstract:||Two photonic crystal rings of hexagonal lattice are lying transversely and longitudinally in silicon microcantilever at the junction of the microcantilever and the substrate. This unique dual nano-ring (DNR) resonator demonstrates channel drop filter characteristics. When DNR is used as sensing element of a microcantilever sensor, the wavelength shift of resonant peak measured at the backward drop terminal is a function of applied force at the microcantilever tip. The derived Q-factor is about 3000, and the minimum detectable force can be as small as 37nN for longitudinal case and 16.7nN for transverse case. ©2010 IEEE.|
|Source Title:||2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010|
|Appears in Collections:||Staff Publications|
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