Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2010.5672125
Title: Configuration analysis of sensing element for microcantilever sensor using dual nano-ring resonator
Authors: Li, B.
Hsiao, F.-L. 
Lee, C. 
Issue Date: 2010
Source: Li, B.,Hsiao, F.-L.,Lee, C. (2010). Configuration analysis of sensing element for microcantilever sensor using dual nano-ring resonator. 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 : 181-182. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2010.5672125
Abstract: Two photonic crystal rings of hexagonal lattice are lying transversely and longitudinally in silicon microcantilever at the junction of the microcantilever and the substrate. This unique dual nano-ring (DNR) resonator demonstrates channel drop filter characteristics. When DNR is used as sensing element of a microcantilever sensor, the wavelength shift of resonant peak measured at the backward drop terminal is a function of applied force at the microcantilever tip. The derived Q-factor is about 3000, and the minimum detectable force can be as small as 37nN for longitudinal case and 16.7nN for transverse case. ©2010 IEEE.
Source Title: 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
URI: http://scholarbank.nus.edu.sg/handle/10635/69693
ISBN: 9781424489251
DOI: 10.1109/OMEMS.2010.5672125
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