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Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/69682
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dc.titleComputational study of an optical NEMS sensor
dc.contributor.authorLee, C.
dc.contributor.authorXiang, W.
dc.contributor.authorHsiao, F.-L.
dc.date.accessioned2014-06-19T03:03:28Z
dc.date.available2014-06-19T03:03:28Z
dc.date.issued2009
dc.identifier.citationLee, C.,Xiang, W.,Hsiao, F.-L. (2009). Computational study of an optical NEMS sensor. 2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009 : 299-302. ScholarBank@NUS Repository.
dc.identifier.isbn9789810836948
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/69682
dc.description.abstractOptical nanoelectromechanical systems (NEMS) based cantilever sensor embedded with a nanocavity resonator is investigated in this study. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The sensor characteristics of NEMS-cantilevers with various lengths and the same nanocavity structure are studied in air and water. © 2009 IEEE NANO Organizers.
dc.sourceScopus
dc.subjectMicrocantilever
dc.subjectNanomechanical
dc.subjectNEMS
dc.subjectSensor
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.sourcetitle2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009
dc.description.page299-302
dc.identifier.isiutNOT_IN_WOS
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