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|Title:||Applications of scanning near-field photon emission microscopy|
|Citation:||Isakov, D.V.,Tan, B.W.M.,Phang, J.C.H.,Yeo, Y.C.,Tio, A.A.B.,Zhang, Y.,Geinzer, T.,Balk, L.J. (2009). Applications of scanning near-field photon emission microscopy. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 631-634. ScholarBank@NUS Repository. https://doi.org/10.1109/IPFA.2009.5232566|
|Abstract:||In this paper, the application of scanning near-field photon emission microscopy for imaging photon emission sites is demonstrated. Photon emissions generated by a Fin-FET test structure with one metallization layer are imaged with spatial resolution of 50 nm using scattering dialectic probe. The potential applications and limitations of the technique are discussed. ©2009 IEEE.|
|Source Title:||Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA|
|Appears in Collections:||Staff Publications|
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