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|Title:||Applications of scanning Near-field photon emission microscopy|
|Citation:||Isakov, D., Tan, B., Phang, J., Yeo, Y., Tio, A., Zhang, Y., Geinzer, T., Balk, L. (2008). Applications of scanning Near-field photon emission microscopy. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 25-29. ScholarBank@NUS Repository. https://doi.org/10.1361/cp2008istfa025|
|Abstract:||In this paper, the application of scanning near-field photon emission microscopy for imaging photon emission sites is demonstrated. Photon emissions generated by a Fin-FET test structure with one metallization layer are imaged with spatial resolution of 50 nm using scattering dialectic probe. The potential applications and limitations of the technique are discussed. Copyright © 2008 ASM International ®.|
|Source Title:||Conference Proceedings from the International Symposium for Testing and Failure Analysis|
|Appears in Collections:||Staff Publications|
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