Please use this identifier to cite or link to this item: https://doi.org/10.1361/cp2008istfa025
Title: Applications of scanning Near-field photon emission microscopy
Authors: Isakov, D.
Tan, B.
Phang, J. 
Yeo, Y. 
Tio, A.
Zhang, Y.
Geinzer, T.
Balk, L.
Issue Date: 2008
Citation: Isakov, D., Tan, B., Phang, J., Yeo, Y., Tio, A., Zhang, Y., Geinzer, T., Balk, L. (2008). Applications of scanning Near-field photon emission microscopy. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 25-29. ScholarBank@NUS Repository. https://doi.org/10.1361/cp2008istfa025
Abstract: In this paper, the application of scanning near-field photon emission microscopy for imaging photon emission sites is demonstrated. Photon emissions generated by a Fin-FET test structure with one metallization layer are imaged with spatial resolution of 50 nm using scattering dialectic probe. The potential applications and limitations of the technique are discussed. Copyright © 2008 ASM International ®.
Source Title: Conference Proceedings from the International Symposium for Testing and Failure Analysis
URI: http://scholarbank.nus.edu.sg/handle/10635/69438
ISBN: 9780871707147
DOI: 10.1361/cp2008istfa025
Appears in Collections:Staff Publications

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