Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/69062
Title: A self-sensing thermal actuator incorporating micromirror for tracking mechanism of optical drive
Authors: Yang, J.P.
Deng, X.C.
Chong, T.C. 
Keywords: Micromirror
Optical drive
Piezoresistive sensor
Thermal actuator
Issue Date: 2004
Source: Yang, J.P.,Deng, X.C.,Chong, T.C. (2004). A self-sensing thermal actuator incorporating micromirror for tracking mechanism of optical drive. Proceedings of IEEE Sensors 2 : 900-903. ScholarBank@NUS Repository.
Abstract: In this paper, a novel self-sensing thermal actuator incorporating micromirror is proposed as a fine positioning actuator for precise-tracking mechanism of high-density optical drive. Due to the bimorph effect, a bi-layer cantilever consisting of two materials with different thermal expansion can provide force or displacement with change in temperature. In the proposed thermal actuator, an integrated micromirror suspended by the four identical thermal bi-layer cantilevers is vertically driven to move upwards by driving voltage. In the meanwhile, the mirror position can he detected by an embedded high-sensitivity piezoresistive sensor. The process flow of the self-sensing thermal actuator incorporating micromirror is presented with the prototypes. The experimental results show that the micromirror can be driven up to an equivalent 1.4μm displacement in tracking direction by the driving voltage of 3 V. The device also has a measured resonant frequency of 7kHz and displacement sensitivity of 0.04ppm/Å to support high bandwidth servo feedback control in optical drive. © 2004 IEEE.
Source Title: Proceedings of IEEE Sensors
URI: http://scholarbank.nus.edu.sg/handle/10635/69062
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