A low-voltage vibratory microgyroscope with ASIC control

Abstract

A low-voltage bulk micromachined microgyroscope is presented in this paper. An ASIC (Application Specific Integrated Circuit) is integrated on the same silicon die to minimize the parasitic effect and to ensure the high sensitivity of the microgyroscope. In addition, a comparison between comb-actuation and parallel-plate actuation was made mathematically to describe the system dynamics clearly. Constraints on the sensitivity and actuation voltage are extremely crucial to modern low-rate high-resolution microgyroscopes used in aerospace applications.