Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.425357
Title: A low-voltage vibratory microgyroscope with ASIC control
Authors: Liang, Y.C. 
Zhao, T.
Xu, Y.P. 
Boh, S.S.
Keywords: ASIC
Comb drive
Microgyroscope
Parallel plate actuation
Issue Date: 2001
Source: Liang, Y.C., Zhao, T., Xu, Y.P., Boh, S.S. (2001). A low-voltage vibratory microgyroscope with ASIC control. Proceedings of SPIE - The International Society for Optical Engineering 4408 : 40-49. ScholarBank@NUS Repository. https://doi.org/10.1117/12.425357
Abstract: A low-voltage bulk micromachined microgyroscope is presented in this paper. An ASIC (Application Specific Integrated Circuit) is integrated on the same silicon die to minimize the parasitic effect and to ensure the high sensitivity of the microgyroscope. In addition, a comparison between comb-actuation and parallel-plate actuation was made mathematically to describe the system dynamics clearly. Constraints on the sensitivity and actuation voltage are extremely crucial to modern low-rate high-resolution microgyroscopes used in aerospace applications.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/68864
ISSN: 0277786X
DOI: 10.1117/12.425357
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