Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/68731
Title: A CMOS fully-integrated low-voltage vibratory microgyroscope
Authors: Liang, Y.C. 
Zhao, T.
Xu, Y.P. 
Boh, S.S.
Keywords: ASIC
Comb drive
Microgyroscope
Parallel plate actuation
Issue Date: 2001
Source: Liang, Y.C.,Zhao, T.,Xu, Y.P.,Boh, S.S. (2001). A CMOS fully-integrated low-voltage vibratory microgyroscope. IEEE Region 10 International Conference on Electrical and Electronic Technology : 825-828. ScholarBank@NUS Repository.
Abstract: A low-voltage bulk micromachined microgyroscope is presented in this paper. An ASIC (Application Specific Integrated Circuit) is integrated on the same silicon die to minimize the parasitic effect and to ensure the high sensitivity of the microgyroscope. Constraints on the sensitivity and actuation voltage are extremely crucial to modern low-rate high-resolution microgyroscopes used in aerospace applications.
Source Title: IEEE Region 10 International Conference on Electrical and Electronic Technology
URI: http://scholarbank.nus.edu.sg/handle/10635/68731
ISBN: 0780371011
Appears in Collections:Staff Publications

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