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|Title:||A CMOS fully-integrated low-voltage vibratory microgyroscope|
|Authors:||Liang, Y.C. |
Parallel plate actuation
|Citation:||Liang, Y.C.,Zhao, T.,Xu, Y.P.,Boh, S.S. (2001). A CMOS fully-integrated low-voltage vibratory microgyroscope. IEEE Region 10 International Conference on Electrical and Electronic Technology : 825-828. ScholarBank@NUS Repository.|
|Abstract:||A low-voltage bulk micromachined microgyroscope is presented in this paper. An ASIC (Application Specific Integrated Circuit) is integrated on the same silicon die to minimize the parasitic effect and to ensure the high sensitivity of the microgyroscope. Constraints on the sensitivity and actuation voltage are extremely crucial to modern low-rate high-resolution microgyroscopes used in aerospace applications.|
|Source Title:||IEEE Region 10 International Conference on Electrical and Electronic Technology|
|Appears in Collections:||Staff Publications|
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