Please use this identifier to cite or link to this item:
|Title:||A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators|
|Keywords:||Microelectromechanical Systems (MEMS)|
Variable optical attenuator (VOA)
|Citation:||Koh, K.H., Lee, C., Kobayashi, T. (2010). A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators. Procedia Engineering 5 : 613-616. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proeng.2010.09.184|
|Abstract:||A silicon micromirror (5mm x 5mm) with gold coating, actuated by piezoelectric Pb(Zr,Ti)O3 cantilever beams, has been demonstrated for variable optical attenuator (VOA) applications. The device is micromachined from a SOI substrate of 5?m thick Si device layer, with multilayers of Pt/Ti/PZT/Pt/Ti being deposited for use as electrodes. The PZT thin film is deposited by solgel technique and the microstructures are later released from the backside to form a 1x10 array of PZT cantilever arranged in parallel. A piezoelectric constant value of 116pmV-1 was estimated and an attenuation of 40dB was reached when a DC driving voltage of 1V was applied to the top electrodes of all the ten cantilevers while the bottom electrodes are grounded.|
|Source Title:||Procedia Engineering|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Sep 21, 2018
WEB OF SCIENCETM
checked on Sep 11, 2018
checked on Jun 22, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.