Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.proeng.2010.09.184
Title: A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators
Authors: Koh, K.H.
Lee, C. 
Kobayashi, T.
Keywords: Microelectromechanical Systems (MEMS)
Optical MEMS
Piezoelectric actuator
Variable optical attenuator (VOA)
Issue Date: 2010
Source: Koh, K.H., Lee, C., Kobayashi, T. (2010). A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators. Procedia Engineering 5 : 613-616. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proeng.2010.09.184
Abstract: A silicon micromirror (5mm x 5mm) with gold coating, actuated by piezoelectric Pb(Zr,Ti)O3 cantilever beams, has been demonstrated for variable optical attenuator (VOA) applications. The device is micromachined from a SOI substrate of 5?m thick Si device layer, with multilayers of Pt/Ti/PZT/Pt/Ti being deposited for use as electrodes. The PZT thin film is deposited by solgel technique and the microstructures are later released from the backside to form a 1x10 array of PZT cantilever arranged in parallel. A piezoelectric constant value of 116pmV-1 was estimated and an attenuation of 40dB was reached when a DC driving voltage of 1V was applied to the top electrodes of all the ten cantilevers while the bottom electrodes are grounded.
Source Title: Procedia Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/68708
ISSN: 18777058
DOI: 10.1016/j.proeng.2010.09.184
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