Please use this identifier to cite or link to this item: https://doi.org/10.1109/JSTQE.2009.2022959
Title: A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators
Authors: Lee, C. 
Hsiao, F.-L. 
Kobayashi, T.
Koh, K.H.
Ramana, P.V.
Xiang, W. 
Yang, B.
Tan, C.W.
Pinjala, D.
Keywords: Microelectromechanical systems (MEMS)
Mirror
Optical MEMS
Piezoelectric actuator
PZT
Variable optical attenuators (VOAs)
Issue Date: Sep-2009
Citation: Lee, C., Hsiao, F.-L., Kobayashi, T., Koh, K.H., Ramana, P.V., Xiang, W., Yang, B., Tan, C.W., Pinjala, D. (2009-09). A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators. IEEE Journal on Selected Topics in Quantum Electronics 15 (5) : 1529-1536. ScholarBank@NUS Repository. https://doi.org/10.1109/JSTQE.2009.2022959
Abstract: A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-μm PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively. © 2009 IEEE.
Source Title: IEEE Journal on Selected Topics in Quantum Electronics
URI: http://scholarbank.nus.edu.sg/handle/10635/68706
ISSN: 1077260X
DOI: 10.1109/JSTQE.2009.2022959
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