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|Title:||3-D MEMS VOA using electromagnetic and electrothermal actuations|
|Source:||Koh, K.H.,Lee, C. (2012). 3-D MEMS VOA using electromagnetic and electrothermal actuations. Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012 : 255-256. ScholarBank@NUS Repository. https://doi.org/10.1109/OECC.2012.6276467|
|Abstract:||An aluminum-coated CMOS compatible silicon micromirror for variable optical attenuation in a three-dimensional free space arrangement has been characterized in terms of hybrid actuation mechanism which combines electromagnetic and electrothermal actuators. © 2012 IEEE.|
|Source Title:||Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012|
|Appears in Collections:||Staff Publications|
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