Please use this identifier to cite or link to this item: https://doi.org/10.1109/OECC.2012.6276467
Title: 3-D MEMS VOA using electromagnetic and electrothermal actuations
Authors: Koh, K.H.
Lee, C. 
Issue Date: 2012
Source: Koh, K.H.,Lee, C. (2012). 3-D MEMS VOA using electromagnetic and electrothermal actuations. Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012 : 255-256. ScholarBank@NUS Repository. https://doi.org/10.1109/OECC.2012.6276467
Abstract: An aluminum-coated CMOS compatible silicon micromirror for variable optical attenuation in a three-dimensional free space arrangement has been characterized in terms of hybrid actuation mechanism which combines electromagnetic and electrothermal actuators. © 2012 IEEE.
Source Title: Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012
URI: http://scholarbank.nus.edu.sg/handle/10635/68680
ISBN: 9781467309776
DOI: 10.1109/OECC.2012.6276467
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