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Please use this identifier to cite or link to this item: https://doi.org/10.1109/SENSOR.2007.4300492
DC FieldValue
dc.title12.9MHz Lame-mode differential SOI bulk resonators
dc.contributor.authorKhine, L.
dc.contributor.authorPalaniapan, M.
dc.contributor.authorWong, W.-K.
dc.date.accessioned2014-06-19T02:51:51Z
dc.date.available2014-06-19T02:51:51Z
dc.date.issued2007
dc.identifier.citationKhine, L.,Palaniapan, M.,Wong, W.-K. (2007). 12.9MHz Lame-mode differential SOI bulk resonators. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems : 1753-1756. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/SENSOR.2007.4300492" target="_blank">https://doi.org/10.1109/SENSOR.2007.4300492</a>
dc.identifier.isbn1424408423
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/68667
dc.description.abstractIn this paper, differentially driven 12.9MHz square resonators in Lamé mode with two different types of anchor - T-anchor and straight beam anchor are presented in an attempt to investigate how the anchor design influences the quality factor, Q values. These square resonators operated in a vacuum pressure of 36μTorr exhibited Q values of 807,000 and 404,000, respectively. This difference in Q values for the two resonators is probably due to differing energy losses in their respective anchors. These resonators were fabricated using SOIMUMPs process from MEMSCAP. ©2007 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/SENSOR.2007.4300492
dc.sourceScopus
dc.subjectLamé mode
dc.subjectMEMS
dc.subjectQ
dc.subjectResonators
dc.subjectStraight beam anchor
dc.subjectT-anchor
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/SENSOR.2007.4300492
dc.description.sourcetitleTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
dc.description.page1753-1756
dc.identifier.isiutNOT_IN_WOS
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