Please use this identifier to cite or link to this item: https://doi.org/10.1364/OE.14.006788
Title: White-light interference microscopy: A way to obtain high lateral resolution over an extended range of heights
Authors: Roy, M.
Sheppard, C.J.R. 
Cox, G.
Hariharan, P.
Issue Date: 2006
Source: Roy, M., Sheppard, C.J.R., Cox, G., Hariharan, P. (2006). White-light interference microscopy: A way to obtain high lateral resolution over an extended range of heights. Optics Express 14 (15) : 6788-6793. ScholarBank@NUS Repository. https://doi.org/10.1364/OE.14.006788
Abstract: A problem with conventional techniques of interference microscopy, when profiling surfaces with an extended range of heights, is that only points on a single plane are in sharp focus. Other points, which are higher or lower, may be out of focus, with a consequent loss of lateral resolution. We show that white-light interference microscopy, with an achromatic phase-shifter, makes it possible to produce a three-dimensional representation of such surfaces with high lateral resolution over the entire range of heights. © 2006 Optical Society of America.
Source Title: Optics Express
URI: http://scholarbank.nus.edu.sg/handle/10635/67349
ISSN: 10944087
DOI: 10.1364/OE.14.006788
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