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|Title:||White-light interference microscopy: A way to obtain high lateral resolution over an extended range of heights|
|Citation:||Roy, M., Sheppard, C.J.R., Cox, G., Hariharan, P. (2006). White-light interference microscopy: A way to obtain high lateral resolution over an extended range of heights. Optics Express 14 (15) : 6788-6793. ScholarBank@NUS Repository. https://doi.org/10.1364/OE.14.006788|
|Abstract:||A problem with conventional techniques of interference microscopy, when profiling surfaces with an extended range of heights, is that only points on a single plane are in sharp focus. Other points, which are higher or lower, may be out of focus, with a consequent loss of lateral resolution. We show that white-light interference microscopy, with an achromatic phase-shifter, makes it possible to produce a three-dimensional representation of such surfaces with high lateral resolution over the entire range of heights. © 2006 Optical Society of America.|
|Source Title:||Optics Express|
|Appears in Collections:||Staff Publications|
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