Please use this identifier to cite or link to this item: https://doi.org/10.1364/OPEX.12.002512
Title: Low-coherence interference microscopy using a ferro-electric liquid crystal phase-modulator
Authors: Roy, M.
Sheppard, C.J.R. 
Hariharan, P.
Issue Date: 31-May-2004
Source: Roy, M., Sheppard, C.J.R., Hariharan, P. (2004-05-31). Low-coherence interference microscopy using a ferro-electric liquid crystal phase-modulator. Optics Express 12 (11) : 2512-2516. ScholarBank@NUS Repository. https://doi.org/10.1364/OPEX.12.002512
Abstract: We describe a computer-controlled low-coherence interference microscope, based on a Linnik interferometer configuration that can rapidly and accurately map the shape of micro-machined surfaces exhibiting steps and discontinuities. The novel feature of the system is a fast, switchable achromatic phase-modulator operating on the geometric phase, using a pair of ferro-electric liquid crystal devices. © 2004 Optical Society of America.
Source Title: Optics Express
URI: http://scholarbank.nus.edu.sg/handle/10635/67145
ISSN: 10944087
DOI: 10.1364/OPEX.12.002512
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