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|Title:||Low-coherence interference microscopy using a ferro-electric liquid crystal phase-modulator|
|Citation:||Roy, M., Sheppard, C.J.R., Hariharan, P. (2004-05-31). Low-coherence interference microscopy using a ferro-electric liquid crystal phase-modulator. Optics Express 12 (11) : 2512-2516. ScholarBank@NUS Repository. https://doi.org/10.1364/OPEX.12.002512|
|Abstract:||We describe a computer-controlled low-coherence interference microscope, based on a Linnik interferometer configuration that can rapidly and accurately map the shape of micro-machined surfaces exhibiting steps and discontinuities. The novel feature of the system is a fast, switchable achromatic phase-modulator operating on the geometric phase, using a pair of ferro-electric liquid crystal devices. © 2004 Optical Society of America.|
|Source Title:||Optics Express|
|Appears in Collections:||Staff Publications|
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