Please use this identifier to cite or link to this item: https://doi.org/10.1007/s10404-009-0436-3
Title: Fabrication of three-dimensional hemispherical structures using photolithography
Authors: Lim, C.T.
Low, H.Y.
Ng, J.K.K.
Liu, W.-T. 
Zhang, Y. 
Keywords: 3D structures
Microfluidics
Photolithography
Soft lithography
SU-8
Issue Date: Nov-2009
Source: Lim, C.T., Low, H.Y., Ng, J.K.K., Liu, W.-T., Zhang, Y. (2009-11). Fabrication of three-dimensional hemispherical structures using photolithography. Microfluidics and Nanofluidics 7 (5) : 721-726. ScholarBank@NUS Repository. https://doi.org/10.1007/s10404-009-0436-3
Abstract: A photolithography technique using SU-8 and PDMS was developed to fabricate three-dimensional hemispherical structures. This technique utilized a mask-aligner and normal binary coded photomasks to generate hemispherical pits on SU-8, followed by PDMS molding to obtain an array of dome-shaped structures. Using this technique, a microfluidic device was fabricated with a patterning area that consisted of an array of 5 μm wells and dome-shaped structures with 10 μm diameter and 6 μm height. Encoded microbeads, 6 μm in size, were immobilized and patterned in the microfluidic device under flow conditions and a DNA hybridization experiment was performed to demonstrate the incorporation of encoded beads that would enable a high level of multiplexing in bioassays. © 2009 Springer-Verlag.
Source Title: Microfluidics and Nanofluidics
URI: http://scholarbank.nus.edu.sg/handle/10635/67052
ISSN: 16134982
DOI: 10.1007/s10404-009-0436-3
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