Please use this identifier to cite or link to this item: https://doi.org/10.1109/TADVP.2009.2013658
Title: Design, fabrication, and assembly of an optical biosensor probe package for OCT (optical coherence tomography) application
Authors: Premachandran, C.S.
Khairyanto, A.
Sheng, K.C.W.
Singh, J.
Teo, J.
Yingshun, X.
Nanguang, C. 
Sheppard, C. 
Olivo, M.
Keywords: 3-D MEMS
Biomedical optical imaging
Biosensor
MEMS packaging
Micro-electro-mechanical system (MEMS)
Micromirror
Mirrors
Optical coherence tomography (OCT)
Optical device fabrication
Optical imaging
Optical probe
Optical scattering
Probes
Silicon
Silicon optical bench (SiOB)
Issue Date: 2009
Source: Premachandran, C.S., Khairyanto, A., Sheng, K.C.W., Singh, J., Teo, J., Yingshun, X., Nanguang, C., Sheppard, C., Olivo, M. (2009). Design, fabrication, and assembly of an optical biosensor probe package for OCT (optical coherence tomography) application. IEEE Transactions on Advanced Packaging 32 (2) : 417-422. ScholarBank@NUS Repository. https://doi.org/10.1109/TADVP.2009.2013658
Abstract: A miniaturized optical bioprobe package is developed using a 3-D micromirror and is tested for bio-imaging application. A silicon optical bench is designed and micromachined to assemble the fiber, lens, and the 3-D micromirror device. A 45° angle trench is used to place the micromirror to achieve larger scanning range. Trace lines are formed on the optical bench and are connected to silicon micromirror using solder. A GRIN lens with lower numerical aperture has been used to focus the optical beam onto the micromirror. The bioprobe is packaged and is tested in a time domain optical coherence tomography (OCT) setup and optical image is obtained for plant tissue. © 2009 IEEE.
Source Title: IEEE Transactions on Advanced Packaging
URI: http://scholarbank.nus.edu.sg/handle/10635/66996
ISSN: 15213323
DOI: 10.1109/TADVP.2009.2013658
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