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Please use this identifier to cite or link to this item: https://doi.org/10.1116/1.1340653
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dc.titleThermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface
dc.contributor.authorZhang, Y.
dc.contributor.authorTan, K.L.
dc.contributor.authorLiaw, B.Y.
dc.contributor.authorLiaw, D.J.
dc.contributor.authorKang, E.T.
dc.contributor.authorNeoh, K.G.
dc.date.accessioned2014-06-17T08:35:33Z
dc.date.available2014-06-17T08:35:33Z
dc.date.issued2001-03
dc.identifier.citationZhang, Y., Tan, K.L., Liaw, B.Y., Liaw, D.J., Kang, E.T., Neoh, K.G. (2001-03). Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface. Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films 19 (2) : 547-556. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1340653
dc.identifier.issn07342101
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/66880
dc.description.abstractA method is developed to obtain good adhesion of fluorinated polyimides (FPI) on a Si(100) surface. The method uses thermal imidization of the fluorinated poly(amic acid) precursors onto an argon plasma-pretreated and glycidyl methacrylate grafted-polymerized Si(100) (GMA-g-Si) surface. It is shown that 180 degree-peel adhesion strengths as high as 8.0 M/cm are achieved by the FPI/GMA-g-Si laminates.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1116/1.1340653
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentCHEMICAL & ENVIRONMENTAL ENGINEERING
dc.contributor.departmentPHYSICS
dc.description.doi10.1116/1.1340653
dc.description.sourcetitleJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
dc.description.volume19
dc.description.issue2
dc.description.page547-556
dc.description.codenJVTAD
dc.identifier.isiut000167591600024
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