Please use this identifier to cite or link to this item:
|Title:||Cool copper template for the formation of oriented nanocrystalline α-tantalum|
|Source:||Yong, C., Zhang, B.C., Seet, C.S., See, A., Chan, L., Sudijono, J., Liew, S.L., Tung, C.-H., Zeng, H.C. (2002-12-05). Cool copper template for the formation of oriented nanocrystalline α-tantalum. Journal of Physical Chemistry B 106 (48) : 12366-12368. ScholarBank@NUS Repository. https://doi.org/10.1021/jp026668c|
|Abstract:||Ta/Cu is a strategic material combination for ultra-large-scale integrated wafer technology. Here we report an unconventional method for the synthesis of a -oriented nanocrystalline α-Ta thin film on freshly prepared Cu(111) templates at <50°C without any redundant underlayers and post-growth treatments. The crystallite size of the α-Ta-containing thin film is in the range of only 6-8 nm, and the Ta film resistivity is reduced significantly from 186 μΩ cm down to 104 μΩ cm with this novel method.|
|Source Title:||Journal of Physical Chemistry B|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Feb 14, 2018
WEB OF SCIENCETM
checked on Jan 17, 2018
checked on Feb 19, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.