Please use this identifier to cite or link to this item: https://doi.org/10.1021/jp026668c
Title: Cool copper template for the formation of oriented nanocrystalline α-tantalum
Authors: Yong, C.
Zhang, B.C.
Seet, C.S.
See, A.
Chan, L.
Sudijono, J.
Liew, S.L.
Tung, C.-H.
Zeng, H.C. 
Issue Date: 5-Dec-2002
Source: Yong, C., Zhang, B.C., Seet, C.S., See, A., Chan, L., Sudijono, J., Liew, S.L., Tung, C.-H., Zeng, H.C. (2002-12-05). Cool copper template for the formation of oriented nanocrystalline α-tantalum. Journal of Physical Chemistry B 106 (48) : 12366-12368. ScholarBank@NUS Repository. https://doi.org/10.1021/jp026668c
Abstract: Ta/Cu is a strategic material combination for ultra-large-scale integrated wafer technology. Here we report an unconventional method for the synthesis of a [110]-oriented nanocrystalline α-Ta thin film on freshly prepared Cu(111) templates at <50°C without any redundant underlayers and post-growth treatments. The crystallite size of the α-Ta-containing thin film is in the range of only 6-8 nm, and the Ta film resistivity is reduced significantly from 186 μΩ cm down to 104 μΩ cm with this novel method.
Source Title: Journal of Physical Chemistry B
URI: http://scholarbank.nus.edu.sg/handle/10635/66508
ISSN: 10895647
DOI: 10.1021/jp026668c
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