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Title: An improved MILP formulation for scheduling an automated wet-etch station
Authors: Karimi, I.A. 
Tan, Z.Y.L.
Bhushan, S.
Keywords: flowshop
shared resource
wet-etch station
Issue Date: 2003
Citation: Karimi, I.A.,Tan, Z.Y.L.,Bhushan, S. (2003). An improved MILP formulation for scheduling an automated wet-etch station. Computer Aided Chemical Engineering 15 (C) : 1181-1186. ScholarBank@NUS Repository.
Abstract: Wet-etching is a key step in wafer fabrication. An automated wet-etch process involves a complex interplay of zero-wait and no-intermediate-storage policies and a shared robot, and poses a challenging scheduling problem. In this paper, we reformulate a previously reported mixed integer linear programming (MILP) model for minimizing the makespan in an automated wet-etch station. Limited numerical evaluation shows that the reformulation outperforms its predecessor by a huge margin. Interestingly, this improvement in performance arises merely from a slightly redefined binary variable. © 2003 Elsevier B.V. All rights reserved.
Source Title: Computer Aided Chemical Engineering
ISSN: 15707946
DOI: 10.1016/S1570-7946(03)80469-8
Appears in Collections:Staff Publications

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