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|Title:||An improved MILP formulation for scheduling an automated wet-etch station|
|Authors:||Karimi, I.A. |
|Source:||Karimi, I.A.,Tan, Z.Y.L.,Bhushan, S. (2003). An improved MILP formulation for scheduling an automated wet-etch station. Computer Aided Chemical Engineering 15 (C) : 1181-1186. ScholarBank@NUS Repository. https://doi.org/10.1016/S1570-7946(03)80469-8|
|Abstract:||Wet-etching is a key step in wafer fabrication. An automated wet-etch process involves a complex interplay of zero-wait and no-intermediate-storage policies and a shared robot, and poses a challenging scheduling problem. In this paper, we reformulate a previously reported mixed integer linear programming (MILP) model for minimizing the makespan in an automated wet-etch station. Limited numerical evaluation shows that the reformulation outperforms its predecessor by a huge margin. Interestingly, this improvement in performance arises merely from a slightly redefined binary variable. © 2003 Elsevier B.V. All rights reserved.|
|Source Title:||Computer Aided Chemical Engineering|
|Appears in Collections:||Staff Publications|
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