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https://doi.org/10.1016/S0098-1354(03)00192-3
DC Field | Value | |
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dc.title | Heuristic algorithms for scheduling an automated wet-etch station | |
dc.contributor.author | Bhushan, S. | |
dc.contributor.author | Karimi, I.A. | |
dc.date.accessioned | 2014-06-17T07:42:13Z | |
dc.date.available | 2014-06-17T07:42:13Z | |
dc.date.issued | 2004-03-15 | |
dc.identifier.citation | Bhushan, S., Karimi, I.A. (2004-03-15). Heuristic algorithms for scheduling an automated wet-etch station. Computers and Chemical Engineering 28 (3) : 363-379. ScholarBank@NUS Repository. https://doi.org/10.1016/S0098-1354(03)00192-3 | |
dc.identifier.issn | 00981354 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/64012 | |
dc.description.abstract | Wet-etching is a key step in wafer fabrication. A wet-etch station is a chemical batch process involving a complex interplay of mixed intermediate storage (MIS) policies and a shared robot for wafer transfers. Its operation poses a challenging resource-constrained scheduling problem that is crucial for enhancing productivity, improving yield and minimizing contamination. In this paper, we develop three new algorithms for scheduling wafer jobs for a given sequence, which comfortably outperform a literature algorithm in terms of solution quality without requiring excessive effort. Furthermore, we propose a simulated annealing (SA) algorithm for sequencing the wafer jobs. Using this SA algorithm, an existing sequencing algorithm based on tabu search (TS), two job-scheduling algorithms and two algorithms for initial job sequence, we identify eight complete algorithms for scheduling operations in an automated wet-etch station (AWS). After a thorough numerical evaluation, we conclude that the TS sequencing strategy combined with two of our three job-scheduling algorithms is the best option that yields up to 25-30% lower makespans than a literature algorithm, and requires acceptable computing times for industrial-scale problems. © 2003 Elsevier Ltd. All rights reserved. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/S0098-1354(03)00192-3 | |
dc.source | Scopus | |
dc.subject | Multi-product plant | |
dc.subject | Resource-constrained scheduling | |
dc.subject | Simulated annealing | |
dc.subject | Tabu search | |
dc.subject | Wafer fabrication | |
dc.subject | Wet-etch station | |
dc.type | Article | |
dc.contributor.department | CHEMICAL & BIOMOLECULAR ENGINEERING | |
dc.description.doi | 10.1016/S0098-1354(03)00192-3 | |
dc.description.sourcetitle | Computers and Chemical Engineering | |
dc.description.volume | 28 | |
dc.description.issue | 3 | |
dc.description.page | 363-379 | |
dc.description.coden | CCEND | |
dc.identifier.isiut | 000188549500009 | |
Appears in Collections: | Staff Publications |
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