Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/62871
Title: Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements
Authors: Tan, L.S. 
Leong, M.S. 
Choo, S.C. 
Issue Date: 6-Apr-1998
Source: Tan, L.S.,Leong, M.S.,Choo, S.C. (1998-04-06). Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements. Solid-State Electronics 42 (4) : 589-594. ScholarBank@NUS Repository.
Abstract: We present a method for the calculation of the potential on the surface of a homogeneous semiconductor slab with a disc source electrode on part of the front surface and a resistive contact over the backside of the entire slab. The imposed boundary condition of a constant potential over the source region gives rise to a pair of dual integral equations, which is transformed into a Fredholm integral equation of the second kind and subsequently solved using a simple numerical integration. The potential distributions on the surface of the slab are calculated for contact-to-semiconductor resistivity ratio in the range of 0 to 1 and for slab thickness ranging from 0.1 to 5x the radius of the disc contact. The results, which are directly applicable to the microelectronic test pattern NBS-3[1], show that there is a strong dependence of the surface potential distribution on the backside contact resistivity. A hitherto used two-dimensional model, with a strip source contact and restricted to the special case of a perfectly conducting backside contact, is shown to provide gross overestimates of the corresponding surface potentials when compared to the present method. © 1998 Elsevier Science Ltd. All rights reserved.
Source Title: Solid-State Electronics
URI: http://scholarbank.nus.edu.sg/handle/10635/62871
ISSN: 00381101
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

35
checked on Dec 8, 2017

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.